Sensata Technologies Holding has filed a patent for apparatuses featuring a junction-isolated semiconductor strain gauge. The apparatus includes a silicon chip with a semiconductor strain gauge comprising resistors formed by locally doping the silicon substrate. A field shield layer isolates the output signal from external electrical fields. GlobalData’s report on Sensata Technologies Holding gives a 360-degree view of the company including its patenting strategy. Buy the report here.

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According to GlobalData’s company profile on Sensata Technologies Holding, Photovoltaic cell testing was a key innovation area identified from patents. Sensata Technologies Holding's grant share as of January 2024 was 57%. Grant share is based on the ratio of number of grants to total number of patents.

Semiconductor strain gauge apparatus with junction isolation

Source: United States Patent and Trademark Office (USPTO). Credit: Sensata Technologies Holding plc

A recently filed patent (Publication Number: US20240027292A1) describes an apparatus comprising a silicon chip with a silicon substrate and a semiconductor strain gauge. The semiconductor strain gauge includes a plurality of resistors formed by locally doping the silicon substrate and junction-isolated by biasing the silicon substrate. Additionally, a field shield layer is included to isolate the output signal of the semiconductor strain gauge from external electrical fields. The resistors are electrically connected in a specific configuration between bond pads, with junctions surrounding each resistor to enhance performance.

Furthermore, the apparatus includes a glass substrate for coupling the silicon substrate to a contact surface, with the glass substrate not in contact with the resistors. Each resistor in the plurality of resistors is a piezoresistive resistor, providing specific functionality to the apparatus. The silicon chip also features sets of tails extending from the center of the top surface beyond the bond pads, allowing for efficient connections. Overall, the patent outlines a detailed design and configuration of the apparatus to optimize its performance and functionality in various applications.

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