Horiba has developed a concentration control system for gas chambers with improved accuracy and responsiveness. The system includes a flow rate control device, partial pressure measurement device, observer with a model estimating gas state, and a controller adjusting flow rate based on estimated partial pressure. GlobalData’s report on Horiba gives a 360-degree view of the company including its patenting strategy. Buy the report here.
According to GlobalData’s company profile on Horiba, Optoelectronic biosensors was a key innovation area identified from patents. Horiba's grant share as of February 2024 was 50%. Grant share is based on the ratio of number of grants to total number of patents.
Concentration control system for gas chamber with improved accuracy
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A concentration control system has been granted a patent (Publication Number: US11906984B2) that includes a flow rate control device, a partial pressure measurement device, an observer with a model estimating the gas state in a chamber, and a controller setting the flow rate based on input parameters. The system ensures the gas flow rate matches the set flow rate, measures the partial pressure inside the chamber, estimates the gas state, and adjusts the flow rate accordingly.
Furthermore, the system includes a model simulating the conductance of an exhaust flow path, a fixed exhaust valve, and an observer gain H for accurate estimation. The partial pressure measurement device is an NDIR analyzer, and the model accounts for delays in measurement output. The concentration control method and program recording medium also detail the process of inputting parameters, estimating the gas state, and setting the flow rate based on the estimated partial pressure. Overall, the patented system provides a comprehensive solution for controlling gas concentration in a chamber efficiently and accurately.
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